Development of a metrological atomic force microscope with minimized Abbe error and differential interferometer-based real-time position control
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/22/i=9/a=094010/pdf
Reference59 articles.
1. Atomic Force Microscope
2. Nanometrology
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