Author:
Li Jie,Kritsun Oleg,Dasari Prasad,Volkman Catherine,Wallow Tom,Hu Jiangtao
Cited by
6 articles.
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1. Metrology;2021 IEEE International Roadmap for Devices and Systems Outbriefs;2021-11
2. Scatterometry;CIRP Encyclopedia of Production Engineering;2019
3. Nondestructive shape process monitoring of three-dimensional, high-aspect-ratio targets using through-focus scanning optical microscopy;Measurement Science and Technology;2018-11-05
4. Scatterometry;CIRP Encyclopedia of Production Engineering;2018
5. Parameter optimization for through-focus scanning optical microscopy;Optics Express;2016-06-23