Nondestructive shape process monitoring of three-dimensional, high-aspect-ratio targets using through-focus scanning optical microscopy
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://iopscience.iop.org/article/10.1088/1361-6501/aae4c2/pdf
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1. The European nanometrology landscape
2. Limitations of Optical 3D Sensors
3. Addressing FinFET metrology challenges in 1× node using tilt-beam critical dimension scanning electron microscope
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