Scatterometry
Author:
Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/978-3-662-53120-4_16855
Reference14 articles.
1. Calaon M, Madsen MH, Weirich J, Hansen HN, Tosello G, Hansen PE, Garnaes J, Tang PT (2015) Replication fidelity assessment of large area sub-μm structured polymer surfaces using scatterometry. Surf Topogr Metrol Prop 3:045005
2. Chernoff DA, Buhr E, Burkhead DL, Diener A (2008) Picometer-scale accuracy in pitch metrology by optical diffraction and atomic force microscopy. Proc SPIE 6922:69223J–692211
3. Hansen PE, Madsen MH, Lehtolahti J, Nielsen L (2017) Traceable Muller polarimetry and scatterometry for shape reconstruction of grating structures. Appl Surf Sci 421 B:471–479
4. Hsu SC, Yuan CP, Chena C, Yu CC, Hsing H, Wu R, Kuo KTL, Amir N (2015) Scatterometry or imaging overlay a comparative study. Proc SPIE 9424:942409
5. Humphries S (1997) Field solutions on computers. CRC Press, New York
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