Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures-Reference-Cited by-同舟云学术

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Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures

Published:2017-11 Issue: Volume:421 Page:471-479
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Hansen Poul-Erik,Madsen Morten H.,Lehtolahti Joonas,Nielsen Lars

Funder

European Union

Danish Agency for Science

EMRP participating countries within the European Association of National Metrology Institutes

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference26 articles.

1. Handbook of Lasers and Optics;Träger,2012

2. Three-dimensional plasmonic stereoscopic prints in full colour

3. First steps towards a scatterometry reference standard

4. Investigations of the influence of common approximations in scatterometry for dimensional nanometrology

5. Analytical modeling and three-dimensional finite element simulation of line edge roughness in scatterometry

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1. Diffraction‐Based Strategy for Monitoring Topographical Features Fabricated by Direct Laser Interference Patterning;Advanced Engineering Materials;2023-03-23

2. Mueller matrix spectroscopic ellipsometry;Advanced Optical Technologies;2022-06-07

3. Enhanced Measurement Accuracy for Nanostructures Using Hybrid Metrology;Frontiers in Physics;2022-01-19

4. Scatterometry and diffractometry techniques to monitor surfaces textured by rapid ultra-short pulse laser;Journal of Physics: Photonics;2020-06-26

5. Survey of Models for Acquiring the Optical Properties of Translucent Materials;Computer Graphics Forum;2020-05

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