Increasing the spatial resolution of direct laser writing of diffractive structures on thin films of titanium group metals-Reference-Cited by-同舟云学术

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Increasing the spatial resolution of direct laser writing of diffractive structures on thin films of titanium group metals

Published:2019-04-23 Issue: Volume: Page:
ISSN:
Container-title:Holography: Advances and Modern Trends VI
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Author:

Korolkov Victor P.,Sedukhin Andrey G.,Belousov Dmitry A.,Shimansky Ruslan V.,Khomutov Vladimir N.,Mikerin Sergey L.,Spesivtsev Evgeny V.,Kutz Roman I.

Publisher

SPIE

Reference19 articles.

1. Lateral self‐limitation in the laser‐induced oxidation of ultrathin metal films

2. Formation of thermochemical laser-induced periodic surface structures on Ti films by a femtosecond IR Gaussian beam: regimes, limiting factors, and optical properties

3. Features of laser oxidation of thin films of titanium

4. Nanometer scale lithography on silicon, titanium and PMMA resist using scanning probe microscopy

5. Local oxidation nanolithography on Hf thin films using atomic force microscopy (AFM)

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Laser Thermochemical High-Contrast Recording on Thin Metal Films;Nanomaterials;2020-12-30

2. Spectral data of refractive index and extinction coefficient for thin films of titanium group metals used for fabrication of optical microstructures;Data in Brief;2020-02

3. Laser beam diffraction inspection of periodic metal/oxide structures with submicron period;Holography: Advances and Modern Trends VI;2019-04-23

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