Spectral data of refractive index and extinction coefficient for thin films of titanium group metals used for fabrication of optical microstructures-Reference-Cited by-同舟云学术

Spectral data of refractive index and extinction coefficient for thin films of titanium group metals used for fabrication of optical microstructures

Published:2020-02 Issue: Volume:28 Page:104903
ISSN:2352-3409
Container-title:Data in Brief
language:en
Short-container-title:Data in Brief

Author:

Belousov Dmitrij A.,Terent'ev Vadim S.,Spesivtsev Evgeny V.,Korolkov Victor P.

Funder

Russian Science Foundation

Publisher

Elsevier BV

Subject

Multidisciplinary

Reference2 articles.

1. Increasing the spatial resolution of direct laser writing of diffractive structures on thin films of titanium group metals, Proc. SPIE 11030;Korolkov;Holography: Adv. Mod. Trends VI,2019

2. Development of methods and instruments for optical ellipsometry at the institute of semiconductor physics of the Siberian branch of the Russian academy of sciences;Spesivtsev;Optoelectron., Instrum. Data Process.,2011

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