Features of laser oxidation of thin films of titanium
Author:
Publisher
The Optical Society
Subject
Applied Mathematics,Computational Mathematics,General Engineering,Atomic and Molecular Physics, and Optics
Reference6 articles.
1. Laser writing systems and technologies for fabrication of binary and continuous relief diffractive optical elements
2. Electron-beam writing system and its application to large and high-density diffractive optic elements
3. Lateral self‐limitation in the laser‐induced oxidation of ultrathin metal films
4. Local Laser Oxidation of Thin Metal Films: Ultra-resolution in Theory and in Practice
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