1. Ion gauge, a monitoring system and a method for determining a total integrated concentration of substances having a specific molecular weight in a gas sample;Koster,2009
2. Progress in EUV optics lifetime expectations
3. Modeling radiation-induced carbon contamination of extreme ultraviolet optics
4. Benefit Model of Virtual Metrology and Integrating AVM Into MES
5. Towards defect free EUVL reticles: Carbon and particle removal by single dry cleaning process, and pattern repair by HIM;Koster,2011