MFIG — A Mass Filtered Ion Gauge

Author:

Bekman Herman1,Emmelkamp Jurjen1,Westland Youyou1,Elstgeest Dorus1,Mechielsen Thomas1,Haye Michael1,Molkenboer Freek1,Koster Norbert1,Lensen Henk1

Affiliation:

1. Department Nano Instrumentation, TNO

Publisher

Surface Science Society Japan

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,Condensed Matter Physics,Bioengineering,Biotechnology

Reference12 articles.

1. [1] D. Maas, P. Muilwijk, M. van Putten, F. de Graaf, O. Kievit, P. Boerboom, and N. B. Koster, Proc. SPIE 10145, 101452I (2017).

2. [2] RGA Ion Source, Hiden Analytical Ltd. (https://www.hidenanalytical.com/wp-content/uploads/2022/02/RGA-Ion-Source-Assembly-new-format.pdf) (Last accessed: July 31, 2023).

3. [3] J. Orloff, in: Handbook of Charged Particle Optics, 2nd ed., edited by J. Orloff (CRC Press, 2008) pp. 5–6.

4. [4] C. R. Crowell, Solid-State Electron. 8, 395 (1965).

5. [5] J. M. Bernhard, Work Function Study of Iridium Oxide and Molybdenum Using UPS and Simultaneous Fowler-Nordheim I-V Plots with Field Emission Energy Distributions (University of North Texas, Denton, 1999).

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