1. InfraTec GmbH, Dresden, Germany
2. Fraunhofer Institute for Photonic Microsystems (IPMS), Dresden, Germany
3. TU Chemnitz–Center for Microtechnologies (ZfM), Chemnitz, Germany
4. Fraunhofer Institute for Electronic Nano Systems (ENAS), Chemnitz, Germany
5. TU Dresden, Institute of Electromechanical and Electronic Design (IFTE), Dresden, Germany