A 11×6 element pyroelectric detector array utilizing self-polarized pzt thin films grown by sputtering-Reference-Cited by-同舟云学术

A 11×6 element pyroelectric detector array utilizing self-polarized pzt thin films grown by sputtering

Published:1997-09 Issue:1-4 Volume:17 Page:369-376
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Bruchhaus R.¹,Pitzer D.¹,Primig R.¹,Schreiter M.¹,Wersing W.¹,Neumann N.²,Hess N.²,Vollheim J.²,KÖHler R.³,Simon M.⁴

Affiliation:

1. a SIEMENS AG, ZT MF 2, D-81730 Munich, Germany

2. b DIAS Angewandte Sensorik GmbH, D-01217 Dresden, Germany

3. c Institut für Festkörperelektronik , TU Dresden, D-01062, Dresden

4. d Heimann Optoelectronics GmbH, D-65020 Wiesbaden, Germany

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589708013011

Reference14 articles.

1. Pyroelectric infrared array sensors made of c-axis-oriented La-modified PbTiO3 thin films

2. Surface‐micromachined PbTiO3pyroelectric detectors

3. Si-monolithic integrated pyroelectric infrared sensor made of PbTiO3 thin films

4. Bruchhaus , R. Huber , H. Pitzer , D. and Wersing , W. 1994. Proceedings of the Electroceramics IV Edited by: Waser , R. 221–226. Aachen

5. Ferroelectric thin films of PbTiO3system prepared by sputtering deposition and their application to pyroelectric sensors

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