1. Sidewall roughness in nanolithography:origins, metrology and device effects;Constantoudis,2013
2. Towards an integrated Line Edge Roughness Understanding: Metrology, Characterization and Plasma Etching Transfer;Gogolides,2013
3. Unbiased Estimation of Linewidth Roughness;Villarrubia,2005
4. Noise-free estimation of spatial Line Edge/Width Roughness parameters;Constantoudis,2009
5. Bias reduction in roughness measurement through SEM noise removal;Katz,2006