1. EUV Lithography, Second Edition
2. EUV Lithography Programs at Albany Nanotech;Ryan,2006
3. http://semimd.com/blog/2016/11/28/high-na-euv-lithography-investment/
4. Application of EUV resolution enhancement techniques (RET) to optimize and extend single exposure bi-directional patterning for 7nm and beyond logic designs;Kim,2016
5. Stochastic effects in EUV lithography: random, local CD variability, and printing failures;De Bisschop;Journal of Micro/Nanolithography, MEMS, and MOEMS,2017