Residual stress control during the growth and release process in gold suspended microstructures-Reference-Cited by-同舟云学术

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Residual stress control during the growth and release process in gold suspended microstructures

Published:2014-03-07 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Sharma Akshdeep,Bansal Deepak,Kumar Amit,Kumar Dinesh,Rangra Kamaljit

Publisher

SPIE

Reference25 articles.

1. Stresses and deformation processes in thin films on substrates

2. Mechanical properties of thin films

4. Stresses in thin films: The relevance of grain boundaries and impurities

5. Handbook of Measurement of Residual Stresses;Lu,1996

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