Affiliation:
1. ASML, San Jose, California
2. IMEC, Leuven
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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1. Stochastic model prediction of pattern-failure;Metrology, Inspection, and Process Control for Microlithography XXXIV;2020-03-20
2. Unbiased roughness measurements: subtracting out SEM effects, part 3;Metrology, Inspection, and Process Control for Microlithography XXXIII;2019-03-26
3. Process window-based feature and die failure rate prediction;Design-Process-Technology Co-optimization for Manufacturability XIII;2019-03-20
4. Unbiased roughness measurements: Subtracting out SEM effects, part 2;Journal of Vacuum Science & Technology B;2018-11