Shot overlap model-based fracturing for edge-based OPC layouts-Reference-Cited by-同舟云学术

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Shot overlap model-based fracturing for edge-based OPC layouts

Published:2014-03-31 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
Short-container-title:

Author:

Jiang Shangliang,Zakhor Avideh

Publisher

SPIE

Reference27 articles.

1. Yield- and cost- driven fracturing for variable shaped-beam mask writing;Kahng,2004

2. Fast yield driven fracture for variable shaped beam mask writing;Kahng,2006

3. A new figure fracturing algorithm for high quality variable-shaped EB exposure-data generation;Hiroomi,1996

4. Metrics to Assess Fracture Quality for Variable Shaped Beam Lithography;Bloecker,2006

5. Mask data volume: historical perspective and future requirements;Spence,2006

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A hybrid heuristic for the rectilinear picture compression problem;4OR;2022-06-11

2. Impact of parallelism on data volumes for a multibeam mask writer;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11

3. A parallel multibeam mask writing method and its impact on data volumes;32nd European Mask and Lithography Conference;2016-10-20

4. Shot overlap model-based fracturing of curvilinear OPC layouts;SPIE Proceedings;2014-10-15

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