1. Metrics to Assess Fracture Quality for Variable Shaped Beam Lithography;Bloecker,2006
2. Mask data volume: historical perspective and future requirements;Spence,2006
3. A recursive cost-based approach to fracturing;Jiang,2011
4. A cost-driven fracture heuristics to minimize external sliver length;Ma,2011
5. S. Jiang and A. Zakhor, “Shot Overlap Model-Based Fracturing for Edge-Based OPC Layouts,” SPIE Advanced Lithography Conference, San Jose, CA, February 2014.