Author:
Tecpoyotl-Torres Margarita
Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators
2. J. W. Gardner, V. K. Varadan, and O. O. Awadelkarim ,Microsensors MEMS and Smart Devices, John Wiley and Sons, New York (2001).
3. J. Carter, A. Cowen, B. Hardy, R. Mahadevan, M. Stonefield, and S. Wilcenski ,PolyMUMPS Design Handbook, Revision 11.0, MEMSCAP Inc. (2005).
4. Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuator
5. Design and modeling of a MEMS bidirectional vertical thermal actuator
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