Author:
Zhang Zhuo,Zhang Weize,Wu Qiyang,Yu Yueqing,Liu Xinyu,Zhang Xuping
Publisher
Springer International Publishing
Reference19 articles.
1. Aaron, A.G.: Electrothermal properties and modeling of polysilicon microthermal actuators. J. Microelectromech. Syst. 12(4), 513–523 (2003)
2. Baker, M.S.: Final Report: Compliant Thermomechanical MEMS Actuators LDRD #52553, Sandia Report SAND20046635, Sandia National Laboratories, Albuquerque (2004)
3. Chiao, M.: Self-buckling of micromachined beams under resistive heating. J. Microelectromech. Syst. 9(1), 146–151 (2000)
4. Eniko, E.T.: Analytical and experimental analysis of folded beam and V-shaped thermal microactuators. In: SEM 10th International Congress and Exposition, Costa Mesa, California (2004)
5. Eniko, E.T.: Analytical model for analysis and design of V-shaped thermal microactuators. J. Microelectromech. Syst. 14(4), 788–798 (2005)
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