Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions-Reference-Cited by-同舟云学术

Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

Published:2018-03-19 Issue: Volume: Page:
ISSN:
Container-title:Novel Patterning Technologies 2018
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Author:

Zoellner Jens-Peter,Holz Mathias,Reum Alexander,Durrani Zahid,Jones Mervyn E.,Aydogan Cemal,Bicer Mahmut,Alaca Erdem B.,Kuehnel Michael,Fröhlich Thomas,Manske Eberhard,Fuessl Roland,Rangelow Ivo W.,Kaestner Marcus,Lenk Claudia,Ahmad Ahmad,Ivanov Tzvetan,Lenk Steve,Hofmann Martin,Guliyev Elshad,Reuter Christoph,Budden Matthias

Publisher

SPIE

Reference57 articles.

1. Pattem-generation and pattern-transfer for single-digit nano devices;Rangelow,2016

2. Surface and Interface Analysis

3. Nanometer-Scale Fabrication by Simultaneous Nanoshaving and Molecular Self-Assembly

4. Atomic force microscopy as a tool for atom manipulation

5. Thermomechanical writing with an atomic force microscope tip

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