1. Department of Mechanical Engineering, Koc University, Sarıyer, 34450 Istanbul, Turkey
2. Department of Micro- and Nanoelectronic Systems, TU Ilmenau, 98693 Ilmenau, Germany
3. nano analytik GmbH, 98693 Ilmenau, Germany
4. Koc University Surface Technologies Research Center (KUYTAM), Koc University, Sarıyer, 34450 Istanbul, Turkey