Author:
Chien Sheng-Wei,Cai Jia-Syun,Lee Chien-Lin,Tsai Kuen-Yu,Shiely James P.,St. John Matt
Reference8 articles.
1. Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects
2. Optimizing models based OPC fragmentation using genetic algorithms;Dipaola,2008
3. OPC recipe optimization using simulated annealing;Desouky,2010
4. Optimize the OPC control recipe with cost function;Liu,2010
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