Author:
Chen Ying,Lin Yibo,Chen Rui,Dong Lisong,Wu Ruixuan,Gai Tianyang,Ma Le,Su Yajuan,Wei Yayi
Funder
National Major Science and Technology Projects of China
Subject
Atomic and Molecular Physics, and Optics
Reference24 articles.
1. Wavelength-specific reflections: A decade of extreme ultraviolet actinic mask inspection research
2. Euvl mask blank repair;Barty,2002
3. Phase-independent multilayer defect repair for euv photomasks;Zhao,2016
4. Actinic defect counting statistics over 1-cm2 area of euvl mask blank;Jeong,2000
5. Euv mask reflectivity measurements with micron-scale spatial resolution;Goldberg,2008
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