Boron delta doping in Si and Si0.8Ge0.2layers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104060
Reference21 articles.
1. Boron doping of SiGe base of heterobipolar transistors
2. Si/siGe heterojunction bipolar transistor with base doping highly exceeding emitter doping concentration
3. Complex free‐carrier profile synthesis by ’’atomic‐plane’’ doping of MBE GaAs
4. Delta- (°-) doping in MBE-grown GaAs: Concept and device application
5. Delta- (°-) doping in MBE-grown GaAs: Concept and device application
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4. Delta-doping of boron atoms by photoexcited chemical vapor deposition;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2012-03
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