Plasma‐deposited thin‐film step coverage calculated by computer simulation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.95196
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1. Calculation of Evaporated Film Thickness Distribution on Nonplanar Surfaces for Variable Angle Vapor Incidence
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4. Columnar structure and texture of iron films evaporated at oblique incidence
5. Columnar microstructure in vapor-deposited thin films
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