Hot filament assisted deposition of silicon nitride thin films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.107557
Reference14 articles.
1. Some Properties of Vapor Deposited Silicon Nitride Films Using the SiH[sub 4]-NH[sub 3]-H[sub 2] System
2. The electronic properties of plasma‐deposited films of hydrogenated amorphous SiNx(0
3. Physical‐Electrical Properties of Silicon Nitride Deposited by PECVD on III–V Semiconductors
4. Vapor growth of diamond on diamond and other surfaces
5. Vapor Deposition of Diamond Particles from Methane
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