Influence of reactant properties in deposition of silicon oxycarbide thin films by hot filament chemical vapor deposition
Author:
Funder
Consejo Nacional de Ciencia y Tecnología
Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1557/s43580-024-00877-2.pdf
Reference23 articles.
1. G.M. Renlund, S. Prochazka, R.H. Doremus, Silicon oxycarbide glasses: Part II. Structure and properties. J. Mater. Res. 6(12), 2723–2734 (1991). https://doi.org/10.1557/jmr.1991.2723
2. P. Colombo, J.R. Hellmann, D.L. Shelleman, Mechanical properties of silicon oxycarbide ceramic foams. J. Am. Ceram. Soc. 84(10), 2245–2251 (2001). https://doi.org/10.1111/j.1151-2916.2001.tb00996.x
3. Y.Y. Ivanova, Y.E. Vueva, Silicon oxycarbide glasses from gel hybrid structures. Adv. Mater. Res. 39–40, 77–80 (2008). https://doi.org/10.4028/www.scientific.net/amr.39-40.77
4. N. Liao, B. Zheng, H. Zhou, W. Xue, Effect of carbon content on the structure and electronic properties of silicon oxycarbide anodes for lithium–ion batteries: A first-principles study. J. Mater. Chem. A 3(9), 5067–5071 (2015). https://doi.org/10.1039/c4ta06932c
5. X. Yu, L. Yin, H. Lu, Y. Huo, S. Jiang, L. Zhao, B. Man, T. Ning, Third-order optical nonlinearity in silicon oxycarbide films. Opt. Mater. 104, 109945 (2020). https://doi.org/10.1016/j.optmat.2020.109945
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