Cracks and blisters formed close to a silicon wafer surface by He-H co-implantation at low energy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4938108
Reference23 articles.
1. Separation of silicon wafers by the smart-cut method
2. Surface plasmon enhanced silicon solar cells
3. Heterogeneous Integration of Compound Semiconductors
4. A transmission electron microscopy quantitative study of the growth kinetics of H platelets in Si
5. Impact of the transient formation of molecular hydrogen on the microcrack nucleation and evolution in H-implanted Si (001)
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