A transmission electron microscopy quantitative study of the growth kinetics of H platelets in Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.125606
Reference11 articles.
1. Silicon on insulator material technology
2. Silicon carbide on insulator formation using the Smart Cut process
3. Layer splitting process in hydrogen-implanted Si, Ge, SiC, and diamond substrates
4. Application of hydrogen ion beams to Silicon On Insulator material technology
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