Author:
Hong C. H.,Park C. Y.,Kim H.‐J.
Subject
General Physics and Astronomy
Cited by
44 articles.
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3. Thin Films on Silicon;Handbook of Silicon Based MEMS Materials and Technologies;2015
4. Introduction;Poly-SiGe for MEMS-above-CMOS Sensors;2013-07-18
5. Crystallized poly-silicon thin film laterally induced by the Ni/Si oxide source;Acta Physica Sinica;2010