Author:
Ruiz Pilar González,Meyer Kristin De,Witvrouw Ann
Reference95 articles.
1. A. Witvrouw, M. Gromova, A. Mehta, S. Sedky, P. de Moor, K. Baert, C. van Hoof, Poly SiGe: a superb material for MEM. Proc. Mat. Res. Soc. 782, 25–36 (2004)
2. A. Witvrouw, L. Haspeslagh, O.V. Pedreira, J. De Coster, I. De Wolf, H.A.C Tilmans, T. Bearda, B. Schlatmann, M. van Bommel, M.-C. de Nooijer, P.H.C. Magnee, E.J. Lous, M. Hagting, J. Lauria, R. Vanneer, B. van Drieenhuizen, 11-megapixel CMOS-integrated SiGe micromirror arrays for high-end applications. J. Microelectromech. Syst. 19, 202–214 (2010)
3. A. Scheurle, T. Fuchs, K. Kehr, C. Leinenbach, S. Kronmuller, A. Arias, J. Ceballos, M. Lagos, J. Mora, J. Munoz, A. Ragel, J. Ramos, S. Van Aerde, J. Spengler, A. Mehta, A. Verbist, B. Du Bois, and A. Witvrouw, A 10
$$\upmu $$
m thick poly-sige gyroscope processed above 0.35
$$\upmu $$
m CMOS, in Proceeding of the IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS), pp. 39–42, Jan 2007
4. R.H. Havemann, J.A. Hutchby, High-performance interconnects: an integration overview. Proc. IEEE 89(5), 586–601 (2001)
5. M. Gad-el-Hak, The MEMS Handbook (CRC press LLC, New York, 2002). (Introduction)