Electrical characterization of AlxTiyOz mixtures and Al2O3–TiO2–Al2O3 nanolaminates
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2822460
Reference54 articles.
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5. Composition, surface morphology and electrical characteristics of Al2O3–TiO2 nanolaminates and AlTiO films on silicon
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