Electron and negative ion densities in C2F6 and CHF3 containing inductively coupled discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.373437
Reference21 articles.
1. An Inductively-Coupled Plasma Source for the Gaseous Electronics Conference Rf Reference Cell
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4. Diagnostics of Fluorine Negative Ions by Laser Photodetachment Combined with a Heated Probe in High-Density CF 4 Plasmas
5. Negative Ion Density Determination Using Probe to Detect Photo-Detached Electron by Continuous Wave Laser
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