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Sputtering of silicon membranes with nanoscale thickness

Published:2016-06-28 Issue:24 Volume:119 Page:245105
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Hobler Gerhard¹^ORCID,Nietiadi Maureen L.²^ORCID,Bradley R. Mark³,Urbassek Herbert M.²^ORCID

Affiliation:

1. Institute of Solid-State Electronics, TU Wien, Floragasse 7, A-1040 Wien, Austria

2. Physics Department and Research Center OPTIMAS, University Kaiserslautern, Erwin-Schrödinger-Straße, D-67663 Kaiserslautern, Germany

3. Department of Physics, Colorado State University, Fort Collins, Colorado 80523, USA

Funder

National Science Foundation (NSF)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://scitation.aip.org/deliver/fulltext/aip/journal/jap/119/24/1.4954680.pdf?itemId=/content/aip/journal/jap/119/24/10.1063/1.4954680&mimeType=pdf&containerItemId=content/aip/journal/jap

Reference41 articles.

1. Ion and electron irradiation-induced effects in nanostructured materials

2. Sputtering from spherical Au clusters by energetic atom bombardment

3. Sputtering of a Au surface covered with large spherical clusters

4. Sputtering of nanoparticles: Molecular dynamics study of Au impact on 20nm sized Au nanoparticles

5. Enhanced sputtering from nanoparticles and thin films: Size effects

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sputter yields of surfaces with nanoscale textures: Analytical results and Monte Carlo simulations;Journal of Applied Physics;2023-02-09

2. Second order corrections to the sputter yield of a curved surface;Journal of Applied Physics;2021-05-21

3. Correlative microscopy combining transmission electron microscopy and secondary ion mass spectrometry: A general review on the state-of-the-art, recent developments, and prospects;Applied Physics Reviews;2019-06

4. Defect formation in multiwalled carbon nanotubes under low-energy He and Ne ion irradiation;Beilstein Journal of Nanotechnology;2018-07-09

5. Sputtering of SicGe1−c nanospheres;Physical Review B;2018-04-10

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