Second order corrections to the sputter yield of a curved surface
Author:
Affiliation:
1. Departments of Physics and Mathematics, Colorado State University, Fort Collins, Colorado 80523, USA
2. Institute of Solid-State Electronics, TU Wien, Gußhausstraße 25-25a, A-1040 Wien, Austria
Funder
National Science Foundation
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0047520
Reference41 articles.
1. A mechanism of surface micro-roughening by ion bombardment
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5. Sputtering from spherical Au clusters by energetic atom bombardment
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3. Sputter yields of surfaces with nanoscale textures: Analytical results and Monte Carlo simulations;Journal of Applied Physics;2023-02-09
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