Pd/AlN/SiC thin-film devices for selective hydrogen sensing
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1415777
Reference7 articles.
1. A hydrogen−sensitive MOS field−effect transistor
2. Platinum–aluminum nitride–silicon carbide diodes as combustible gas sensors
3. Silicon-carbide MOS capacitors with laser-ablated Pt gate as combustible gas sensors
4. Fast chemical sensing with metal-insulator silicon carbide structures
5. G. W. Hunter, P. G. Neudeck, L.Y. Chen, D. Knight, C. C. Liu, and Q. H. Wu, Proceedings of the 6th International Conference, Kyoto, [Inst. Phys. Conf. Ser. IPHSAC142, 741 (1995)].IPHSAC0305-2346
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