Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin films
Author:
Affiliation:
1. Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna 1040, Austria
2. CTR Carinthian Tech Research AG, Villach 9524, Austria
Funder
COMET
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4907208
Reference22 articles.
1. Stress-driven AlN cantilever-based flow sensor for fish lateral line system
2. Dielectric Properties of Reactively Sputtered Films of Aluminum Nitride
3. Morphological properties of AlN piezoelectric thin films deposited by DC reactive magnetron sputtering
4. Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications
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