Novel phase measurement technique of the heterodyne laser interferometer
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2038527
Reference8 articles.
1. A New Optical Interferometer for Absolute Measurement of Linear Displacement in the Subnanometer Range
2. Highly precise and stable displacement-measuring laser interferometer with differential optical paths
3. Electronic limitations in phase meters for heterodyne interferometry
4. Dual mode phase measurement for optical heterodyne interferometry
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1. Phase Measurement Method Based on Digital Dual Frequency Comb for High-Precision High-Speed Heterodyne Interferometry;IEEE Sensors Journal;2023-05-01
2. A study on tunable spectral frequency shift method with low phase noise;Optoelectronics Letters;2019-05
3. A review of interferometry for geometric measurement;Measurement Science and Technology;2018-09-05
4. Simple digital phase-measuring algorithm for low-noise heterodyne interferometry;Measurement Science and Technology;2016-06-23
5. High resolution heterodyne interferometer based on time-to-digital converter;Review of Scientific Instruments;2012-04
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