Highly precise and stable displacement-measuring laser interferometer with differential optical paths

Author:

Hosoe Shigeru

Publisher

Elsevier BV

Subject

General Engineering

Reference7 articles.

1. Recent advantage in displacement measuring interferometry;Bobroff;Meas Sci Technol,1993

2. A new laser measurement system for precision metrology;Sommargren;Prec Eng,1987

3. Linear/angular interferometer for wafer stage metrology;Sommargren,1989

4. Displacement measurement repeatability in tens of nanometers with laser interferometry;Steinmetz;SPIE,1988

5. Drift of nonlinearity in the heterodyne interferometer;Hou;Prec Eng,1994

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