Phase Measurement Method Based on Digital Dual Frequency Comb for High-Precision High-Speed Heterodyne Interferometry
Author:
Affiliation:
1. School of Instrumentation Science and Engineering, Harbin Institute of Technology, Harbin, China
Funder
National Key Research and Development Program of China
National Natural Science Foundation of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10113769/10090438.pdf?arnumber=10090438
Reference28 articles.
1. Signal processing method of phase correction for laser heterodyne interferometry
2. Direct phase determination using simple phase lock loop for heterodyne displacement-measuring interferometers;thanh-dong sr;Proc SPIE,2018
3. Laser heterodyne interference signal processing method based on phase shift of reference signal
4. Digital transformations of the phase measurement information in the high resolution heterodyne laser interferometry;teleshevsky;Proc SPIE,2007
5. A phase encoding method for improving the resolution and reliability of laser interferometers (displacement measurement)
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