Carrier transport in polycrystalline silicon films deposited by a layer‐by‐layer technique
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.357240
Reference21 articles.
1. High-mobility poly-Si thin-film transistors fabricated by a novel excimer laser crystallization method
2. Improvement of n-Type Poly-Si Film Properties by Solid Phase Crystallization Method
3. Effect of pressure on the growth of crystallites of low‐pressure chemical‐vapor‐deposited polycrystalline silicon films and the effective electron mobility under high normal field in thin‐film transistors
4. Pulsed laser‐induced melting followed by quenching of silicon films
5. Low-temperature fabrication of high-mobility poly-Si TFTs for large-area LCDs
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