Solubility enhancement of metallic impurities in silicon by rapid thermal annealing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348444
Reference17 articles.
1. Transition metals in silicon
2. Diffusion of manganese in silicon studied by deep‐level transient spectroscopy and tracer measurements
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4. Diffusion and Solubility of Titanium in Silicon
5. Chromium diffusivity in boron-doped silicon: Reassessment of the activation energy from low temperature measurements
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