Laser wavelength and spot diameter dependence of extreme ultraviolet conversion efficiency in ω, 2ω, and 3ω Nd:YAG laser-produced plasmas
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1968415
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1. Laser-plasma x-ray source by cryogenic target and high-repetition-rate slab YAG laser
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3. 3rd Int’l Extreme Ultra-Violet Lithography (EUVL) Symposium;Sasaki A.,2004
4. X-ray generation in cryogenic targets irradiated by 1 μm pulse laser
5. Enhancement of keV x‐ray emission in laser‐produced plasmas by a weak prepulse laser
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