1. V. Bakshi (ed.), EUV Lithography (SPIE, Washington, 2018)
2. V. Saile, U. Wallrabe, O. Tabata, J.G. Korvink (eds.), LIGA and its Applications (Wiley-VCH, Germany, 2009)
3. S. Amano, in Recent Advance in Nanofabrication Techniques and Applications, ed. B. Cui (InTech, Croatia, 2011) Chap 18, p. 353.
4. S. Amano, in Advance in Engineering Research, ed. V.M. Petrova (Nova, New York, 2021) Vol. 40, Chap. 1, p. 1.
5. S. Amano, K. Masuda, A. Shimoura, S. Miyamoto, T. Mochizuki, Appl. Phys. B 101, 213 (2010)