An evaluation of errors in determining the refractive index and thickness of thin SiO2 films using a rotating analyzer ellipsometer
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Published:1995-11
Issue:11
Volume:66
Page:5277-5281
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ISSN:0034-6748
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Container-title:Review of Scientific Instruments
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language:en
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Short-container-title:Review of Scientific Instruments
Author:
Kim S. Y.,Irene E. A.
Cited by
24 articles.
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