Atomic scale trap state characterization by dynamic tunneling force microscopy
Author:
Affiliation:
1. Department of Physics and Astronomy, University of Utah, Salt Lake City, Utah 84112, USA
2. Logic Technology Development, Intel Corporation, Hillsboro, Oregon 97124, USA
Funder
Semiconductor Research Corporation (SRC)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4890966
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5. G. G. Gischia , K. Croes , G. Groeseneken , Z. Tokei , V. Afanas'ev , and L. Zhao , in IEEE International Reliability Physics Symposium (IRPS) (IEEE, 2010), pp. 549–555.
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