Carbon diffusion in silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.122483
Reference14 articles.
1. Physical mechanisms of transient enhanced dopant diffusion in ion-implanted silicon
2. EPR Observation of the Isolated Interstitial Carbon Atom in Silicon
3. Carbon-induced undersaturation of silicon self-interstitials
4. The diffusivity of carbon in silicon
5. Diffusion of Carbon-14 in Silicon
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