Structural and electrical properties of neodymium oxide high-k gate dielectrics
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2402237
Reference13 articles.
1. High-κ gate dielectrics: Current status and materials properties considerations
2. Atomic Layer Deposition of Lanthanum Oxide Films for High-κ Gate Dielectrics
3. Praseodymium silicate formed by postdeposition high-temperature annealing
4. Excellent frequency dispersion of thin gadolinium oxide high-k gate dielectrics
5. Properties of high κ gate dielectrics Gd2O3 and Y2O3 for Si
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