Spatial dependence of particle light scattering in an rf silane discharge
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.95648
Reference16 articles.
1. Radical species in argon‐silane discharges
2. Spectroscopic detection of silylene in the infrared multiphoton decomposition of silane
3. Growth and defect chemistry of amorphous hydrogenated silicon
4. Observation of Si2in a chemical vapor deposition reactor by laser excited fluorescence
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